Method and apparatus for a large volume plasma processor that can utilize any feedstock material
OwnerBernard J. Eastlundinventor
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Abstract
This invention utilizes a large volume plasma processor to completely ionize any feedstock material and deposit the ionized and unionized species of elements of the feedstock material on deposition stages. Apparatus is provided for generating a toroidal, high temperature, low density plasma in the large volume plasma processor. Key aspects of the method provide for (a) controlling temperature by rapid heating and (b) maintaining toroidal plasma current by rapid application of increased driving voltages. The invention provides a large surface area source of any desired elements to increase safety and thruput in microchip fabrication. Other applications include nanotechnology fabrication and improvement of surface properties of materials.
Claims20
A method of coating deposition stages with the ionized species of elements of any feedstock material comprising:
- a. filling a containment vessel with a low density gas chosen from a group of low atomic number gases that include hydrogen, helium and neon;
- b. ionizing the low density gas generating a low temperature process plasma;
- c. heating said low temperature process plasma to a temperature of at least 5000,000.degree. C. generating a high temperature process plasma;
- d. confining most of the high temperature process plasma spaced from walls of the containment vessel by a magnetic field;
- e. injecting pellets of a feedstock material into the high temperature, process plasma forming a combination plasma comprising the high temperature process plasma and a plasma of the feedstock material;
- f. rapidly increasing power supplied to said combination plasma to balance radiation losses transforming all of the feedstock material into a product plasma comprising principally lower temperature, higher, density ionized and unionized species of the feedstock material;
- g. confining most of said product plasma spaced from the walls of said containment vessel by magnetic fields generated by applying higher voltage to maintain electric currents in a magnetic coil;
- h. moving a portion of said product plasma across a space between said product plasma and the walls of the containment vessel to deposit on deposition stages lining the walls of the containment vessel by adjusting magnitude of said magnetic fields;
- i. removing said deposition stages from said containment vessel.
An apparatus which is a large volume plasma processor for coating deposition stages with ionized and unionized species of elements of any feedstock material comprising:
- a. a toroidal containment vessel with walls;
- b. a gas inlet to supply a generating gas into said toroidal containment vessel;
- c. means to ionize the generating gas;
- d. means for generating a toroidal magnetic field substantially parallel to the walls of said toroidal containment vessel and substantially filling said toroidal containment vessel;
- e. means for generating a toroidal current which is substantially parallel to said toroidal magnetic field and generates a poloidal magnetic field perpendicular to said toroidal magnetic field;
- f. means for igniting the generating gas to produce a low temperature process plasma;
- g. means for heating the low temperature process plasma to produce a high temperature process plasma which has a low density and a temperature of at least 500,000.degree. C.;
- h. means for controlling a space between said high temperature process plasma and the walls of the containment vessel;
- i. means for injecting pellets of a feedstock material at high velocity into said high temperature process plasma;
- j. means for rapidly increasing a heating power of the means for heating to balance radiation losses during a transformation of said high temperature process plasma into a product plasma comprising principally lower temperature, higher density ionized and unionized species of the feedstock material;
- k. means for rapidly stabilizing said product plasma to maintain a space between the product plasma and the walls of the containment vessel;
- l. means for moving said product plasma across a space between the product plasma and the walls of the containment vessel to deposit the ionized and unionized species of the feedstock material on deposition stages lining the walls of the containment vessel;
- m. means for removing the deposition stages.
Dependencies are inferred from the claim text.