Enclosure for load lock interface
AssigneeApplied Materials, Inc.
InventorPhilip M. Salzman
Life of this patent
Estimating the term…
Abstract
A load lock interface for a semiconductor wafer process chamber includes a platform adapted to receive and engage with a carrier containing a cassette of semiconductor wafers; and a removable bell-shaped enclosure adapted to surround and seal said carrier from the ambient environment while the carrier is engaged with the load lock interface platform. Once engaged with the carrier, the platform is operable to withdraw the cassette of wafers from the carrier and position the cassette within a load lock. Thereafter, the cassette may be indexed and individual wafers may be removed from the cassette for processing within the process chamber.
Claims9
A load lock for a microenvironment wafer carrier, comprising:
- a load lock having side walls joined to a base portion thereof to define a first inner volume, said load lock having an outer edge and a movable platform with a top surface, said load lock further defining a wafer port in communication with a process environment;
- a wafer carrier including side walls joined to an upper wafer carrier portion to define a second inner volume that is adapted to surround a cassette holding a plurality of semiconductor wafers, said wafer carrier further including a movable base portion having a bottom surface arranged for complementary engagement with said top surface of said load lock movable platform;
- a removable enclosure having a base perimeter edge, said enclosure being adapted to surround said wafer carrier and to engage with said load lock outer edge and hermetically seal a third inner volume defined by said enclosure, and thereby surround and seal said wafer carrier from an ambient environment while said wafer carrier is placed on said load lock platform;
- means for equalizing ambient pressures in said first, second and third inner volumes defined by said enclosure, said load lock and said wafer carrier;
- means for moving said load lock platform downward to separate said movable base portion from said wafer carrier and thereby lower said cassette into said first inner volume to effect transfer of said wafers between said process environment and said load lock;
- and
- means for passing individual wafers from said cassette through said wafer port between said load lock and said process environment.
A load lock for a microenvironment wafer carrier, comprising:
- a load lock having side walls joined to a base portion thereof to define a first inner volume, said load lock having an outer edge and a movable platform with a top surface, said load lock further defining a wafer port in communication with a process environment;
- a wafer carrier including side walls joined to an upper wafer carrier portion to define a second inner volume that is adapted to surround a cassette holding a plurality of semiconductor wafers, said wafer carrier further including a movable base portion having a bottom surface arranged for complementary engagement with said top surface of said load lock movable platform;
- a removable enclosure having a base perimeter edge, said enclosure being adapted to surround said wafer carrier and to engage with said load lock outer edge and hermetically seal a third inner volume defined by said enclosure, and thereby surround and seal said wafer carrier from an ambient environment while said wafer carrier is placed on said load lock platform;
- a vent for equalizing ambient pressures in said first, second and third inner volumes defined by said enclosure, said load lock and said wafer carrier;
- an indexer for moving said load lock platform downward to separate said movable base portion from said wafer carrier and thereby lower said cassette into said first inner volume to effect transfer of said wafers between said process environment and said load lock;
- and
- a robot for passing individual wafers from said cassette through said wafer port between said load lock and said process environment.
Dependencies are inferred from the claim text.