X-ray imaging system

Abstract

In a micro focus X-ray imaging system using a transmission type target, a transmitted X-ray image is uniformly bright. The micro focus X-ray imaging system is structured so that (i) the fine focussed electron beam 1 is irradiated to a target in which a tungsten film 10 is deposited thinly on a beryllium foil 11, (ii) the tungsten film 10 is cooled by a circular thermoelectric cooling device 14, and (iii) an X-ray image intensifier 22 is installed other than on the prolonged line in a travel direction of the electron beam 1 and the transmitted X-ray image of a sample 7 is detected by the X-ray image intensifier 22 and the CCD camera 24. As a result thereof, in the case of a thin transmission-type target, intensive X-rays are generated in the travel direction of the electron beam and X-ray image intensifier is installed other than on the prolonged line in the travel direction of the electron beam, so that X-rays with a uniform intensity can be irradiated to the X-ray image intensifier and accordingly a transmitted X-ray image which is uniformly bright can be obtained.

Dependencies are inferred from the claim text.