Process and device composite simulation system and simulation method

A unified process and device simulation system unitarily performing simulation for a process design and a device design of a semiconductor device, comprising:

• process simulator performing a process simulation for one of a pair of regions of the semiconductor device, said regions being symmetric in configuration and structure about a center line which is perpendicular to a direction about which the simulation is carried out, and generating a first simulation data;
• extension data adding means for generating an extension data by extending the first simulation data to a predetermined length and for adding said extension data to said first simulation data;
• mirror reversal processing means for performing a mirror reversing process for establishing a mirror data of said first simulation data and said extension data symmetric about the center line and connecting said mirror data to said first simulation data and said extension data to generate a second data equivalent to a process simulation data obtained through the process simulation for an entire region of the semiconductor device;
• and
• a device simulator for performing a device simulation with respect to said second data on the basis of a predetermined analysis condition.

A unified process and device simulation system unitarily performing simulation for a process design and a device design of a semiconductor device, comprising:

• a process simulator performing a process simulation for one of a pair of regions of the semiconductor device, said regions being symmetric in configuration and structure about a center line which is perpendicular to a direction about which the simulation is carried out, and generating a first simulation data;
• mirror reversal processing means for performing a mirror reversing process for establishing a mirror data of said first simulation data symmetric about said center line;
• data cutting off means for cutting off a predetermined length of said first simulation data from the center line, and for connecting said first simulation data from which said predetermined length is cut off and said mirror data to generate a second data equivalent to a process simulation data obtained through the process simulation for an entire region of the semiconductor device;
• and
• a device simulator for performing a device simulation with respect to said second data on the basis of a predetermined analysis condition.

A unified process and device simulation system unitarily performing simulation for a process design and a device design of a semiconductor device, comprising:

• a process simulator performing a process simulation for one of a pair of regions of the semiconductor device, said regions being symmetric in configuration and structure about a center line which is perpendicular to a direction about which the simulation is carried out, and generating a first simulation data;
• data cutting off means for cutting off a predetermined length of said first simulation data from the center line;
• mirror reversal processing means for performing a mirror reversing process for establishing a mirror data with respect to said first simulation data from which said predetermined length is cut off symmetric about said center line and connecting said mirror data to said first simulation data from which said predetermined length is cut off to generate a second data equivalent to a process simulation data obtained through the process simulation for an entire region of the semiconductor device;
• and
• a device simulator for performing a device simulation with respect to said second data on the basis of a predetermined analysis condition.

A method for performing process and device composite simulation for unitarily performing simulation for a process design and a device design of a semiconductor device by an electronic computer, comprising the steps of:

• performing a process simulation for one of a pair of regions of the semiconductor device, said regions being symmetric in configuration and structure about a center line which extends perpendicular to a direction about which the simulation is carried out, and generating a first simulation data;
• performing a mirror reversing process for establishing a mirror data of said first simulation data symmetric about said center line and connecting said mirror data to said first simulation data at the center line in order to generate a second data;
• extending the first simulation data at said center line in the direction about which the simulation is carried out;
• and
• performing a device simulation with respect to said second data on the basis of a predetermined analysis condition.