System for testing electric properties of an object
AssigneeTokyo Electron Limited
InventorKenichi Tsutsumi
Life of this patent
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AssigneeTokyo Electron Limited
InventorKenichi Tsutsumi
Estimating the term…
A tester system comprising first areas on which objects to be tested are mounted, a first movable alignment section for aligning objects, first and second tester units each having terminals connected to each object and serving to test electric properties of each object, a second movable alignment section for aligning the objects after they have been tested, second areas on which the objects are mounted after they have been tested, a loader for transferring a predetermined number of objects from the first areas to the first alignment section, a first carrier mechanism for holding the predetermined number of objects aligned on the first alignment section and transferring them to the first tester unit, connecting the object to the terminals of the first tester unit, and transferring the objects to the second alignment section, a second carrier mechanism for holding the predetermined number of objects aligned on the first alignment section and transferring them to the second tester unit, connecting the object to the terminals of the second tester unit, and transferring the objects to the second alignment section, an unloader for transferring the predetermined number of tested objects aligned on the second alignment section to the second areas.
A tester system comprising
Dependencies are inferred from the claim text.