Semiconductor wafer contact system and method for contacting a semiconductor wafer
AssigneeMotorola, Inc.
InventorsPatrick F. Thompson, William M. Williams, Scott E. Lindsey, Barbara Vasquez
Life of this patent
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AssigneeMotorola, Inc.
InventorsPatrick F. Thompson, William M. Williams, Scott E. Lindsey, Barbara Vasquez
Estimating the term…
A semiconductor wafer contact system includes a base substrate (13) which has an array of raised supports (18). The array of raised supports (18) are distributed in a pattern corresponding to the pattern of electrical contacts (12) on the semiconductor wafer (10), to be contacted. In between the base substrate (13) and the wafer to be contacted (10) is a flexible circuit layer (14) including an array of electrical contacts (15) having the same pattern as the contacts (12) of the wafer and the raised supports (18). The raised supports (18) provide focused and localized force, pressing the membrane test contacts (15) against the wafer electrical contacts (12).
A semiconductor wafer contact test system comprising:
A semiconductor wafer contact test system comprising:
A semiconductor wafer contact test system comprising:
A semiconductor wafer contact test system comprising:
A method for contacting a semiconductor wafer, the method comprising the steps of:
A method of manufacturing a semiconductor device comprising:
A method of contacting a semiconductor wafer, the method comprising the steps of:
Dependencies are inferred from the claim text.