Semiconductor device capable of preventing humidity invasion
AssigneeYamaha Corporation
InventorTakahisa Yamaha
Life of this patent
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Abstract
In an IC chip having an interlevel insulation film constituted by a first level silicon oxide film, a spin-on-glass film, a second level silicon oxide film, the SOG film is partially removed in a buffer region of a closed loop shape inside of the chip periphery and surrounding the chip inner region. The second level silicon oxide film and a passivation insulation film are formed covering the SOG film and buffer region. Water contents are intercepted by the buffer region and will not reach the element region. It is therefore possible to prevent an inversion of the conductivity type at the surface of a well region in the element region or a corrosion of wiring layers, thereby improving the reliability of an IC device.
Claims11
A semiconductor wafer, comprising:
- a) a plurality of semiconductor chip regions, comprising:
- (1) device regions to form a device structure thereon, the device structure having electrodes electrically connected to active regions provided therein;
- and
- (2) a buffer region provided on a periphery of the device region;
- and
- b) an insulating layer having moisture permeability for electrically insulating the electrodes therebetween, the insulating layer being formed over the device regions while being removed from a buffer region of the semiconductor chip regions.
A semiconductor wafer comprising:
- (a) a plurality of semiconductor chip regions, comprising:
- (1) device regions to form a device structure thereon;
- and
- (2) a buffer region provided on a periphery of the device regions;
- and
- (b) a laminated insulating layer structure formed over the semiconductor chip regions, but not over the buffer region, said laminated insulating layer structure comprising:
- (1) a first insulating sublayer deposited over the semiconductor region:
- (2) a second insulating sublayer deposited over the first insulating sublayer, the second insulating sublayer having moisture permeability;
- and
- (3) a third insulating sublayer deposited over the second insulating sublayer.
Dependencies are inferred from the claim text.