Measuring device utilizing a thermo-electromotive element
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsRimantas Vaitkus, Shigenori Hayashi, Masaya Kadono
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsRimantas Vaitkus, Shigenori Hayashi, Masaya Kadono
Estimating the term…
To provide a flow rate sensor of minimized power consumption. Form a Fe pattern 104 and Pt pattern 103 on the surface of a diamond thin film 101 by sputtering or evaporation to construct a thermo-electromotive element. Also, form a heating unit 102. On pulsewise heating from the heating unit 102, the temperature of the junction portions 109 becomes higher than that of the junction portions 110 and an output from the thermo-electromotive element is obtained as thermo-electromotive force between the electrodes 107 and 108. This output indicates a response characteristic reflecting the thermal effect exerted from the environment on the diamond thin film. From this output, for example, the flow rate of a fluid flowing in contact with the diamond thin film 101 can be obtained.
A measuring device comprising:
A measuring device comprising:
A measuring device comprising:
A measuring device comprising:
A measuring device comprising:
A measuring device comprising:
A measuring device using a film material wherein said film material with its thermal conductivity K.sub.s, specific heat C.sub.s, and density p.sub.s at 300 K,
Dependencies are inferred from the claim text.