Hard-carbon-film-coated substrate and apparatus for forming the same
AssigneeSanyo Electric Co., Ltd.
InventorsHitoshi Hirano, Keiichi Kuramoto, Yoichi Domoto, Seiichi Kiyama
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Abstract
A hard-carbon-film-coated substrate includes in stacked sequence a substrate, an intermediate layer, and a hard carbon film. The substrate consists of a metal or an alloy mainly composed of Ni or Al, or stainless steel. The intermediate layer is mainly composed of Ru, Si, Ge or carbon, or is a mixed layer including Ru, Si, or Ge mixed with at least one of carbon, nitrogen or oxygen, with a composition gradient across its thickness. An apparatus for forming the coated substrate especially includes means for forming the intermediate layer and means for forming the hard carbon film in the same vacuum chamber.
Claims29
A hard-carbon-film coated substrate comprising:
- a substrate that consists of stainless steel or of a metal or alloy at least mainly composed of Ni or Al;
- an intermediate layer arranged on said substrate that comprises Ru and at least one element selected from carbon, nitrogen and oxygen and that has a compositional gradient across its thickness;
- and
- a predominantly amorphous hard carbon film arranged on said intermediate layer;
- wherein said compositional gradient comprises a predominant proportion of Ru at a side of said intermediate layer adjacent said substrate and a predominant proportion of said at least one element selected from carbon, nitrogen and oxygen at a side of said intermediate layer adjacent said hard carbon film.
A hard-carbon-film coated substrate comprising:
- a substrate that consists of stainless steel or of a metal or alloy at least mainly composed of Ni or Al;
- an intermediate layer that is arranged directly on said substrate and in contact therewith, and that comprises Si and at least one element selected from carbon, nitrogen and oxygen and that has a compositional gradient extending entirely across its thickness;
- and
- a predominantly amorphous hard carbon film arranged on said intermediate layer;
- wherein said compositional gradient comprises a predominant proportion of Si at a side of said intermediate layer adjacent said substrate and a predominant proportion of said at least one element selected from carbon, nitrogen and oxygen at a side of said intermediate layer adjacent said hard carbon film.
A hard-carbon-film coated substrate comprising:
- a substrate that consists of stainless steel or of a metal or alloy at least mainly composed of Ni or Al;
- an intermediate layer arranged on said substrate that comprises Ge and at least one element selected from carbon, nitrogen and oxygen and that has a compositional gradient across its thickness;
- and
- a predominantly amorphous hard carbon film arranged on said intermediate layer;
- wherein said compositional gradient comprises a predominant proportion of Ge at a side of said intermediate layer adjacent said substrate and a predominant proportion of said at least one element selected from carbon, nitrogen and oxygen at a side of said intermediate layer adjacent said hard carbon film.
A hard-carbon-film coated substrate comprising:
- a substrate consisting of a metal or an alloy mainly composed of Ni or Al, or stainless steel,
- an intermediate layer mainly composed of carbon arranged directly on and in contact with said substrate;
- and
- a hard carbon film arranged on said intermediate layer.
Dependencies are inferred from the claim text.