Transparent conductors comprising zinc-indium-oxide and methods for making films
AssigneeLucent Technologies Inc.
InventorsSue A. Carter, Robert J. Cava, Jueinai R. Kwo, Julia M. Phillips, Gordon A. Thomas
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Abstract
Applicant has discovered that aliovalently doped zinc-indium-oxide where In is 40-75% of the metal elements can achieve electrical conductivity comparable to wide band-gap semiconductors presently in use while exhibiting enhanced transparency in both the visible and infrared. The material can be doped to resistivity of less than 1 milliohm-cm by small quantifies of aliovalent dopants, such as tetravalent atoms. It can be deposited on glass substrates in amorphous and polycrystalline films.
Claims11
A transparent conductive material comprising zinc-indium-oxide wherein indium is 40-75 atomic % of the metal elements, said material having an absorption which is less than that of indium tin oxide over a spectral range that includes the range from 500 nm to 900 nm.
Dependencies are inferred from the claim text.