High power capacity magnetron cathode
AssigneeInternational Business Machines Corporation
InventorsDavid L. Gardell, David C. Strippe
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AssigneeInternational Business Machines Corporation
InventorsDavid L. Gardell, David C. Strippe
Estimating the term…
A high power capacity magnetron cathode has coolant fluid control surfaces attached to a supporting structure of a magnet array housed by a magnet array housing. The coolant fluid control surfaces provide radial and axial pumping and circulatory action of liquid coolant introduced into the magnet array housing throughout the housing and about the magnet array to significantly increase cooling efficiency by increasing distribution of coolant circulation. The fluid control surfaces may include fluid conductive vanes in patterns designed to maximize coolant flow. Fluid control surfaces and vanes are additionally provided on interior surfaces of the magnet array housing. The fluid control surfaces and vanes increase the surface area of the array and housing to increase the cooling action of the coolant at the bonding interface of cathode material to the magnet array housing, allowing the cathode to be operated at high power levels without thermal or pressure induced damage to the cathode bond. A non-flat configuration to the mating surfaces of the cathode material with the magnet array housing improves heat transfer away from the bonding layer of the cathode material.
A fluid cooled magnetron cathode and pumping assembly for use in combination with a sputtering device comprising:
A rotatable magnet array for use in a liquid-cooled cathode assembly of a sputtering device, the rotatable magnet array having a plurality of magnets rotatably mountable in a magnet array housing having a coolant inlet port and a coolant outlet port, the rotatable magnet array having fluid control vanes attached to a supporting structure of the magnet array.
Dependencies are inferred from the claim text.