Method of fabricating a color field emission flat panel display tetrode

A method of fabricating an anode plate suitable for use in a field emission display tetrode, said method comprising the steps of:

• (a) providing a transparent substrate having a layer of an electrically conductive material on a surface thereof;
• (b) depositing a first insulating layer over said layer of electrically conductive material;
• (c) forming a plurality of conductive stripes on said first insulating layer;
• (d) depositing a second insulating layer over at least one end portion of said conductive stripes;
• (e) forming bus leads on said second insulating layer over said at least one end portion of said conductive stripes, said bus leads connected to said conductive stripes through via holes etched in said second insulating layer;
• (f) etching said first insulating layer between said conductive stripes, so as to create substantially vertical sidewalls, down to said layer of electrically conductive material;
• and
• (g) depositing luminescent material on regions of said layer of electrically conductive material exposed by said etching step.

A method of fabricating an anode plate for use in a field emission flat panel display tetrode, said method comprising the steps of:

• (a) providing a transparent substrate;
• (b) coating said substrate with a first insulating layer;
• (c) depositing a layer of a transparent, electrically conductive material on said first insulating layer;
• (d) depositing a second insulating layer of high vacuum compatible material over said layer of a transparent, electrically conductive material;
• (e) depositing a second conductive material layer over said second insulating layer;
• (f) patterning and etching said second conductive layer to define a plurality of conductive stripes;
• (g) depositing a third insulating layer over said second insulating layer and said plurality of stripes;
• (h) patterning and etching said third insulating layer to define an active anode region, an anode conduction pad and via locations at end portions of said conductive stripes;
• (i) depositing a third conductive layer over said third insulating layer, said third conductive layer making contact with said conductive stripes through said via locations formed in step (h);
• (i) patterning and etching said third conductive layer to define six bus leads, wherein three bus leads are on each end of said plurality of conductive stripes, each bus lead connecting to every third conductive stripe through said via locations to form three interlineate comb structures;
• (k) depositing a sacrificial layer over the structure thus far fabricated;
• (l) patterning and etching said sacrificial layer to define an area oversized to said third insulating layer and to said conductive stripes, and further defining said anode conduction pad;
• (m) anisotropically etching said second insulating layer so as to create vertical sidewalls down to said layer of transparent, electrically conductive material;
• (n) removing said sacrificial layer;
• and
• (o) depositing luminescent material on regions of said layer of transparent, electrically conductive material exposed by step (m).

A method of fabricating an anode plate suitable for use in a field emission tetrode, said method comprising the steps of:

• (a) providing a substrate having a layer of an electrically conductive material on a surface thereof;
• (b) depositing an insulating layer over said layer of electrically conductive material;
• (c) forming a plurality of conductive stripes on said insulating layer;
• and
• (d) etching said insulating layer between said conductive stripes, so as to create substantially vertical sidewalls, down to said layer of electrically conductive material.