Array of thin film actuated mirrors for use in an optical projection system

An array of M.times.N thin film actuated mirrors for use in an optical projection system, each of the M.times.N thin film actuated mirrors capable of causing a deviation in the optical path of an incident light beam, said array comprising:

• an active matrix including a substrate, a conduction line pattern for carrying a bias voltage to each of the thin film actuated mirrors, an array of M.times.N transistors, each of the transistors being capable of providing an electrical signal to each of the thin film actuated mirrors, and an array of M.times.N connecting terminals, wherein each of the connecting terminals is connected electrically to each of the transistors;
• an array of M.times.N supporting members, each of the supporting members being provided with a conduit;
• and
• an array of M.times.N thin film actuating structures, each of the thin film actuating structures including a first layer made of an electrically conducting and light reflecting material, an electrodisplacive layer having a top and a bottom surfaces, a second layer made of an electrically conducting material, and an elastic layer made of an insulating material, the first and the second layers being placed on the top and the bottom surfaces of the electrodisplacive layer, respectively, the elastic layer being placed on bottom of the second layer, each of the actuating structures being divided into a proximal and a distal ends, the proximal end of each of the actuating structures being secured on top of each of the supporting members, the first layer in each of the actuating structures being divided into a proximal and a distal ends by a gap, the proximal and the distal ends being separated physically and electrically from each other, the proximal end thereof being in an electrical contact with the conduction line pattern to thereby allow it to function as a bias electrode and the distal end thereof to function as a mirror for reflecting the light beam, and the second layer therein is connected electrically to the connecting terminal connected to the transistor through the conduit in each of the supporting members to thereby allow it to function as a signal electrode, wherein the electrical signal applied across the electrodispacive layer in each of the actuating structures between the proximal end of the first layer and the second layer causes a deformation thereof, and hence said each of the actuating structures including the distal end of the first layer acting as the mirror, thereby changing the optical path of the incident light beam.