Method for measuring radical species distribution in plasma and an apparatus therefor

An apparatus for measuring distribution of radical species in plasma which comprises:

• (i) a vacuum container;
• (ii) an optical probe for measuring the light emitted from radical species in the vacuum container;
• (iii) an electrostatic probe for measuring current and voltage in the vacuum container;
• (iv) a linear motion means having a bellows tube, for carrying the optical probe and electrostatic probe into the vacuum container;
• (v) a light analyzing means for analyzing the light measured by the optical probe;
• (vi) an electric signal analyzing means having a detector for measuring current and voltage applied to the electrostatic probe and an analog to digital convertor for transforming the analog signals transmitted from the detectors to corresponding digital signals;
• and,
• (vii) a computing means for analyzing distribution of the radical species in the vacuum container based on the data transmitted from the light analyzing means and electric signal analyzing means, and controlling the moving direction and distance of the linear motion means and the sweeping of the electrostatic probe.