Method and apparatus for determining characteristic electrical material parameters of semi-conducting materials
AssigneePeter Viscor
InventorsPetr Viscor, Jan Vedde
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AssigneePeter Viscor
InventorsPetr Viscor, Jan Vedde
Estimating the term…
The present invention relates to a method for determining characteristic electrical properties of semi-conducting materials wherein the time/frequency dependent electrical impedance or admittance of the material is measured. The invention also relates to an apparatus for carrying out the method. A number of bulb and surface parameters characterize the electrical properties of a given piece of material. These parameters include the dielectric constant .epsilon. of the material, the difference .DELTA..mu..sub.ch in the chemical potential of the bulk of a material and the chemical potential of its surface and/or metal electrode--material surface interface, the density of the majority and minority electrical mobile charge carriers N and N.sub.min, respectively, in the bulk of the material, the electrical mobility .mu. of the majority electrical mobile charges in the bulk of the material and the electrical mobility .mu..sub.min of minority mobile charge carriers, the surface and bulk emission and capture rates E.R. and C.R., respectively, for mobile positive and negative charge carriers characterizing the effect of surface and bulk localized states within the band gap, when they are present, on the electrical transport.
A method for determining characteristic electrical properties of semi-conducting materials wherein the time or frequency dependent electrical impedance Z(t) or Z(.omega.), respectively, or admittance Y(t) or Y(.omega.), respectively, is measured, comprising the steps of establishing a finite, positive (n-type material) or negative (p-type material) difference in the chemical potential between the inner and the surface of the material or between the inner of the material and the metal electrode--material surface interface layer, thereby causing the formation of depletion regions near the electrical contacts and by using the effect of this established difference in the chemical potential on the measured electrical impedance or admittance the step of determining from this measured electrical impedance or admittance one, more or all of the following electrical parameters f the material:
Dependencies are inferred from the claim text.