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US 5,627,394 AGranted
LD-MOS transistor
AssigneeMotorola, Inc.
InventorsChi-Sung Chang, Judith L. Sutor
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Abstract
An object of the present invention is to provide an LD-MOS transistor with a reduced device real estate and high breakdown strength. An extended drain region doped with phosphorus is formed in contact with an underside of an insulation layer and a drain diffusion region, respectively. The insulation layer is deposited over a conductive gate layer and a drain diffusion region, respectively.
Claims3
An LD-MOS transistor comprising:
- a source region of a second conductivity type formed on a surface of a silicon semiconductor substrate of a first conductivity type, the polarity of said first and second conductivity types being opposite to each other;
- a drain region of said second conductivity type, forming a channel region between said source region and said drain region;
- and a conductive gate layer overlying via a gate insulation layer on said channel region, and further comprising:
- a body region of said first conductivity type surrounding said source region and having a dopant concentration higher than that of said silicon semiconductor substrate;
- an extended drain region of said second conductivity type, formed in said channel region toward said source region, said extended drain region being in contact with said drain region wherein a portion of the first conductivity type substrate separates the extended drain region from the body region;
- and
- an additional insulation layer formed between said extended drain region and said conductive gate layer, said additional insulation layer being thicker than said conductive gate layer,
- wherein said extended drain region is doped with phosphorus.
5 more elements
Dependencies are inferred from the claim text.