Scanning near-field optic/atomic force microscope in which imaging light is controlled in relation to a vibrating position of an optical fiber probe

Abstract

A radiated light of a light source for optical characteristic measurement is amplitude modulated by an optical modulator and directed into a light-propagating probe. A phase and intermittent rate of the optical modulator are adjusted by a phase shifter. A sample characteristic measuring light is radiated onto the surface of the sample from the distal end of the probe. A light transmitted through or scattered by the sample, or fluorescent light generated from the sample is directed into a photoelectric converter via an optical system. The light radiating area of sample characteristic measuring light can be efficiently modified to improve the resolution of a light characteristic image of the surface topography and optical characteristic of the sample at high resolution, without relying on the existence of transmissivity and conductivity in the sample.

Dependencies are inferred from the claim text.