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US 5,627,317 AGranted
Acceleration sensor
AssigneeRobert Bosch GmbH
InventorsMichael Offenberg, Wolfgang Buchholtz, Markus Lutz
Life of this patent
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Abstract
A sensor in which the structure of a movable element is produced from an upper silicon layer of a laminated substrate. Individual regions of the upper layer are insulated from one another by insulation trenches which are bridged by conductor tracks coupled to at least one electrode on the movable element and at least one stationary electrode on the upper layer proximate to the at least one electrode on the movable element.
Claims8
A sensor for measuring a force or acceleration, comprising:
- a laminated substrate including:
- an upper silicon layer including a movable element which can be moved due to the force or acceleration and a stationary element,
- an underlying layer,
- means for insulating the upper silicon layer from the underlying layer, and
- electrical supply lines arranged on an upper surface of the upper silicon layer, the electrical supply lines being coupled to the movable and stationary elements;
- and
- a conductor track crossing which includes a region insulated from a remainder of the upper silicon layer, wherein a conductor track lies directly on the insulated region between two contacts and is insulated from the insulated region by means of a surface insulation layer,
- wherein:
- the upper silicon layer includes insulation trenches which penetrate the upper silicon layer completely, for mutually insulating individual regions of the upper silicon layer, and
- the electrical supply lines bridge the insulation trenches between the mutually insulated regions of the upper silicon layer.
7 more elements
Dependencies are inferred from the claim text.