Method for the making of surface-emitting laser diodes with mechanical mask, the apertures having inclined flanks
AssigneeThomson-CSF
InventorsPhilippe Maurel, Jean-Charles Garcia, Jean-Pierre Hirtz
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Abstract
A method for making a set of surface-emitting laser diodes comprises the making of reflectors by the epitaxial growth of at least one semiconductor material through a mask having apertures with inclined flanks. This method leads to the obtaining of the Bragg reflectors obtained in situ, removing the need for the ion etching of a semiconductor substrate followed by a phase for the conditioning of the surface of the sample before the preparation of the desired laser structure. Application: optical power source.
Claims6
A method for the making of an optoelectronic power device that emits coherent light given by a plurality of surface-emitting elementary lasers, wherein said method comprises the following steps:
- the making, through a mechanical mask with apertures having inclined flanks, of reflectors by the epitaxial growth of at least one semiconductor material, said reflectors having flanks that form an angle .theta. with the plane of the substrate on which they are made;
- the growth by selective epitaxy of the constituent layers of the laser structure on said reflectors.
Dependencies are inferred from the claim text.