Hard-carbon-film-coated substrate and apparatus for forming the same
AssigneeSanyo Electric Co., Ltd.
InventorsHitoshi Hirano, Keiichi Kuramoto, Yoichi Domoto, Seiichi Kiyama
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Abstract
A hard-carbon-film-coated substrate includes in stacked sequence a substrate, an intermediate layer, and a hard carbon film. The substrate consists of a metal or an alloy mainly composed of Ni or Al, or stainless steel. The intermediate layer is mainly composed of Ru, Si, Ge or carbon, or is a mixed layer including Ru, Si, or Ge mixed with at least one of carbon, nitrogen or oxygen, with a composition gradient across its thickness. An apparatus for forming the coated substrate especially includes means for forming the intermediate layer and means for forming the hard carbon film in the same vacuum chamber.
Claims19
A hard-carbon-film-coated substrate comprising:
- a substrate consisting of a metal or an alloy at least mainly composed of Ni or Al, or stainless steel;
- an intermediate layer at least mainly composed of Ru arranged on said substrate;
- and
- a predominantly amorphous hard carbon film arranged on said intermediate layer.
A hard-carbon-film-coated substrate comprising:
- a substrate consisting of a metal or an alloy at least mainly composed of Ni or Al, or stainless steel;
- an intermediate layer at least mainly composed of Si arranged directly on and in contact with said substrate;
- and
- a predominantly amorphous hard carbon film arranged on said intermediate layer.
A hard-carbon-film-coated substrate comprising:
- a substrate consisting of a metal or an alloy at least mainly composed of Ni or Al, or stainless steel;
- an intermediate layer at least mainly composed of Ge arranged on said substrate;
- and
- a predominantly amorphous hard carbon film arranged on said intermediate layer.
Dependencies are inferred from the claim text.