Process and apparatus for treating inner surface treatment of chamber and vacuum chamber

Abstract

A rod driver is used to drive a rod so as to move a broach through a continuous vacuum chamber in the axial direction. The broach is provided at the leading end of the rod with cutting and finishing edges at a plurality of stages in the axial direction. The cutting edges each have chip breakers in their outer periphery. The broach is moved in the vacuum chamber to cut the inner surface of the vacuum chamber, so that a new surface is formed. During the cutting at least one of an inert gas, nitrogen, and a mixture of the inert gas and nitrogen is supplied to the cutting edges. The outer diameter of the finishing edge is same as the desired inner diameter of the vacuum chamber and the finishing edges are effective in forming such a vacuum chamber with greater precision and the least friction. As a contaminated and decomposed layer on the inner surface of the vacuum chamber is removed in the axial direction of the inner surface of the vacuum chamber for certain, moreover, gas desorption, from a new surface, originating from thermal desorption and photodesorption generated at the time of synchrotron radiation can be minimized to satisfy a requirement for a vacuum vessel.

Dependencies are inferred from the claim text.