Surface treatment of polishing cloth
AssigneeNEC Corporation
InventorYoshihiro Hayashi
Life of this patent
Estimating the term…
Abstract
An apparatus for surface treatment of polishing cloth includes a rotary cloth mounting section on which a polishing cloth is to be attached, and a rotary surface treatment tool made of an inorganic material other than metal and having at least a protrusion with an irregular surface portion on the surface thereof. The surface treatment tool and the cloth mounting section is rotated and a position of a rotation axis of a first rotating unit is different from that of a rotation axis of a second rotating unit. The rotating surface treatment tool is pressed against the cloth mounting section with a predetermined pressure while the surface treatment and cloth mounting sections are rotated.
Claims24
An apparatus for surface treatment of a polishing cloth, comprising:
- a rotary cloth mounting section on which a polishing cloth is attached;
- a rotary surface treatment tool comprised of a base member made of a material other than metal and having a plurality of protrusions formed integrally thereon by grooves cut in said rotary surface treatment tool, each of said protrusions having an irregular surface;
- first rotating means for rotating said cloth mounting section;
- second rotating means for rotating said rotary surface treatment tool, a position of a rotation axis of said first rotating means being different from that of a rotation axis of said second rotating means;
- and
- pressing means for pressing said rotary surface treatment tool against said cloth mounting section with a predetermined pressure while said rotary surface treatment tool and cloth mounting section are rotated.
An apparatus for surface treatment of a polishing cloth, comprising:
- a rotary mounting section on which said polishing cloth is attached;
- a rotary surface treatment section including a surface treatment tool comprised of a base member made of a material other than metal and having a plurality of protrusions formed integrally thereon by grooves cut in a surface of said surface treatment tool, each of said protrusions having an irregular surface;
- supply means for supplying a process solution containing an abrasive agent to an interface of said surface treatment tool and said polishing cloth to remove shavings from said polishing cloth;
- and
- driving means for rotating said rotary mounting section and said rotary surface treatment section.
An apparatus for surface treatment of a polishing cloth, comprising:
- a rotary mounting section on which said polishing cloth is mounted;
- and
- a surface treatment tool comprised of a base member having grooves cut in a surface of said surface treatment tool, a plurality of plates disposed within said grooves respectively, each of said plates protruding from said grooves and having a plurality of irregular surfaces formed integrally thereon;
- a first driving means for relatively pushing said rotary mounting section and said surface treatment tool against each other while said rotary mounting section and said surface treatment tool are being rotated by a second driving means such that said surface treatment tool always contacts said rotary mounting section in parallel.
Dependencies are inferred from the claim text.