Electrostatic chuck

An electrostatic chuck attached to a susceptor assembly constituted by a combination of a plurality of susceptor members, for chucking/holding an object to be processed with an electrostatic attractive force, comprising:

• a conductive film;
• an insulating coat stuck on a surface of said susceptor assembly to cover said conductive film;
• a feeder circuit for applying a voltage to said conductive film to cause said insulating coat to generate an electrostatic attractive force,
• said feeder circuit including
• a connecting conductor replacing a portion of said insulating coat to be electrically connected to said conductive film,
• a first metallic feeder pin extending through said susceptor assembly from a front surface side to a rear surface side thereof and having one end portion electrically connected to said connecting conductor,
• an insulating member for insulating said first metallic feeder pin from said susceptor assembly,
• an adhesive member for bonding/fixing said insulating member to said first metallic feeder pin and said susceptor assembly,
• a second metallic feeder pin having one end portion pressed against the other end portion of said first metallic feeder pin to be electrically connected to said first metallic feeder pin, and
• a power supply electrically connected to said second metallic feeder pin,
• said insulating member and said adhesive member each consisting of polybenzimidazole whose average molecular weight is in a range of 2,000 to 100,000.