Method for producing ceramic fine particles and apparatus used therefor

An apparatus for producing ceramic fine particles in the range of from 0.001 to 10 .mu.m comprising a starting material vaporizer for vaporizing one or more metal compounds to give gaseous starting materials;

• a device for supplying a carrier gas for conveying said gaseous starting materials;
• a coaxial, double-cylinder reaction apparatus for forming a Taylor vortex flow, the reaction apparatus having a stationary outer cylinder and a rotatable inner cylinder, and further comprising a feed opening for supplying the gaseous starting materials;
• an inner cylinder rotating motor device for rotating said inner cylinder;
• an energy supplying device for supplying energy required for chemical reaction to a reaction space, the reaction space being arranged in an annular portion between the inner and outer cylinders of the reaction apparatus;
• and a device for collecting fine particles.

An apparatus for producing ceramic fine particles in the range of from 0.05 to 5 .mu.m comprising a device for supplying a solution containing one or more metal salts;

• a device for atomizing starting materials for forming fine droplets from said solution to give starting material droplets;
• a device for supplying a carrier gas for conveying said starting material droplets;
• a coaxial, double-cylinder reaction apparatus for forming Taylor vortex flow, the reaction apparatus having a stationary outer cylinder and a rotatable inner cylinder;
• an inner cylinder rotating motor device for rotating said inner cylinder;
• a thermal energy supplying device for supplying thermal energy required for pyrolyric reaction to the reaction space, the reaction space being arranged in an annular portion between the inner and outer cylinders of the reaction apparatus;
• and a device for collecting fine particles.