Method of fabricating barium strontium titanate
AssigneeSymetrix Corporation
InventorsLarry D. McMillan, Carlos A. Paz de Araujo
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Abstract
A precursor liquid comprising barium and strontium 2-ethylhexanoates and titanium 2-methoxyethanol in a 2-methoxyethanol solvent is prepared, a substrate is placed within a vacuum deposition chamber, the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining the chamber at ambient temperature to deposit a layer of the precursor liquid on the substrate. The liquid is dried, baked, and annealed to form a thin film of barium strontium titanate on the substrate. Then an integrated circuit is completed to include at least a portion of the layered superlattice material film in a component of the integrated circuit.
Claims18
A method of fabricating a thin film of barium strontium titanate, said method comprising the steps of:
- (a) providing a liquid precursor including barium, strontium, and titanium in effective amounts for forming barium strontium titanate;
- (b) placing a substrate inside an enclosed deposition chamber;
- (c) producing a mist of said liquid precursor;
- (d) flowing said mist through said deposition chamber to form a layer of the precursor liquid on said substrate;
- and
- (e) treating the liquid layer deposited on said substrate to form a solid film of said barium strontium titanate.
Dependencies are inferred from the claim text.