Dual mode illumination system for optical inspection
AssigneeInternational Business Machines Corporation
InventorsDonald H. Canfield, Todd C. Fellows, Earle W. Gillis, Peter J. Yablonsky
Life of this patent
Estimating the term…
Loading patent…
AssigneeInternational Business Machines Corporation
InventorsDonald H. Canfield, Todd C. Fellows, Earle W. Gillis, Peter J. Yablonsky
Estimating the term…
A dual mode illumination system for optical inspection of products for surface defects and defects in holes in the product includes a first light source for providing illumination along an axis of one or more holes in the product to be inspected, the first light source being positioned on a first side of the product, a second light source providing illumination of the surface of the second side of the product to be inspected, a beam splitter for redirecting light from the second light source to a light sensor while passing light from the first light source to the light sensor. The second light source may be located adjacent to a second side of the product to be tested with the axis of illumination parallel to a major plane of the product. The light sensor may be a video camera connected to a data processing and display system.
An optical inspection system, comprising:
A method for optical inspection of a product having one or more apertures therein, comprising the steps of:
An optical inspection system, comprising:
Dependencies are inferred from the claim text.