Vacuum chuck apparatus

A vacuum chuck apparatus for chucking an article, comprising:

• a plurality of movable suction cups mounted in a suction cup array on a support member and operative to move up and down relative to the support member between an operative position where each of the movable suction cups can attract the article by suction and a retracted position above the operative position,
• drive means for moving the respective movable suction cups up and down relative to the support member independently from each other between the operative position and the retracted position, said drive means including a plurality of air cylinders mounted on said support member, with each of said air cylinders associated with a corresponding one of the movable suction cups, an air pump for supplying pressurized air to said air cylinders, air lines which connect said air pump to said air cylinders, and valve means located in said air lines between said air pump and said air cylinders and for opening and closing said air lines, said valve means comprising first and second electromagnetic valves, and in which each of said air cylinders in a first group thereof is connected to a first common air pipe through a discrete air hose, and said first common air pipe is connected to said air pump via said first electromagnetic valve, whereas each of said air cylinders in a second group thereof is connected to a second common air pipe through a discrete air hose, and said second common air pipe is connected to said air pump via said second electromagnetic valve,
• an article size designating means for outputting a size signal representing the size of the article to be chucked, and
• a control means for controlling the drive means according to the size signal from the article size designating means so that a part of the movable suction cups which are not necessary for chucking the article of the size represented by the size signal are held in the retracted position and the other suction cups are held in the operative position.