Humidity sensor and a method of producing the humidity sensor

Abstract

A humidity sensor to detect humidity by utilizing a change in the electric characteristics of the device corresponding to a change in the humidity. A solution containing manganese acetate, lead acetate and potassium acetate is coated on an alumina substrate on which interdigital electrodes are formed, and heat-treatment is carried out to provide a humidity sensor having a humidity sensing film which mainly contains manganese oxide, lead oxide and a compound of the alkali metal. The humidity sensor shows a low impedance and an appropriate dynamic range of the impedance even after being downsized. The humidity sensor shows a quick response and excellent environmental resistance. In addition, the humidity sensor and a humidity measuring circuit are easily produced. Thus, the humidity sensor can be widely used in those fields that require a humidity sensor of a small size, a quick response, high reliability and a low cost such as in portable instruments and the like.

Dependencies are inferred from the claim text.