US 5,605,179 AGranted

Integrated gas panel

AssigneeInsync Systems, Inc.

InventorsBenjamin R. Strong, Jr., Brent D. Elliot, Frank R. Balma

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Abstract

A novel integrated gas panel is described. The integrated gas panel of the present invention, comprises a plurality of individual process gas modules or blocks coupled together with a plurality of gaskets located between them. Each process gas module comprises an upstream isolation valve coupled between a process gas inlet and an MFC inlet. An upstream purge valve is coupled between an upstream purge port and the MFC inlet. A mass flow controller is coupled between the MFC inlet and an MFC outlet. A mix isolation valve is coupled between the MFC outlet and a mix port. The modules are coupled together such that respective ports of each module are in fluid communication with one another to form a common tube or port. Gaskets placed between the various modules either allow or block the flow of gas between ports of adjacent modules. By arranging blocks and gaskets in different ways, gas panels with a wide variety of different functions and capabilities can be easily designed and fabricated.

Claims3

Dependent claims

An integrated gas panel comprising:

a first process gas module comprising:
a first process gas inlet;
a first upstream isolation valve coupled between said first process gas inlet and a first MFC inlet;
a first upstream purge port;
a first upstream purge valve coupled between said first upstream purge port and said first MFC inlet;
a first mass flow controller (MFC) having an input coupled to said first MFC inlet and an output coupled to a first MFC outlet;
a first mix isolation valve coupled between said first MFC outlet and a first mix port;
and
a second process gas module comprising:
a second process gas inlet;
a second upstream isolation valve coupled between said second process gas inlet and a second MFC inlet;
a second upstream purge port;
a second upstream purge valve coupled between said second upstream purge port and said second MFC inlet;
a second mass flow controller (MFC) having an input coupled to said second MFC inlet and an output coupled to a second MFC outlet;
a second mix isolation valve coupled between said second MFC outlet and a second mix port;
wherein said first upstream purge port is coupled to said second upstream purge port and said first mix port is coupled to said second mix port.

13 more elements

Dependencies are inferred from the claim text.

Facts

Application: 08/404,485Filed 17 Mar 1995
Granted: 25 Feb 1997
Term ends: Not estimatedThe source records don’t support an estimate.

Classification15 codes

F17C 13/04
Details of vessels or of the filling or discharging of vessels: arrangement or mounting of valves
F16K 27/003
Construction of housing ; Use of materials therefor: housing formed from a plurality of the same valve elements
F17C 2205/0323
Fittings, valves, filters, or components in connection with the gas storage device: valves
F17C 2205/0338
Fittings, valves, filters, or components in connection with the gas storage device: pressure regulators