Anode assembly for generating x-rays and instrument with such anode assembly
AssigneePhysical Electronics, Inc.
InventorPaul E. Larson
Life of this patent
Estimating the term…
Abstract
An anode assembly for generating x-rays has a mounting block with a channel therethrough, with a diamond wafer mounted sealingly across an opening in the block so as to have an inner surface in contact with the coolant flowing in the channel. Alternatively, a thicker diamond member is mounted in the block with thermal conduction through the metal block. A metal anode film bonded to the outer surface of the diamond is receptive of a focused electron beam to generate x-rays. The diamond provides cooling in compensation for the film being heated by the electron beam. The assembly is useful in a scanning x-ray monochromator instrument for chemical analysis of a specimen surface.
Claims22
An anode assembly for generating x-rays, comprising:
- a housing having a channel therein receptive of a fluid coolant, the housing further having an opening from the channel and comprising a mounting wall formed of a refractory metal with a low thermal expansion coefficient;
- a diamond wafer mounted sealingly to the mounting wall across the opening so that an outer surface of the diamond wafer faces outwardly and an inner surface of the diamond wafer is in contact with the coolant;
- and
- a metal anode film bonded to the outer surface, the anode film being receptive of an impinging electron beam to generate x-rays characteristic of the metal, whereby the diamond wafer provides cooling in compensation for the anode member being heated by the electron beam, and wherein the mounting wall has one slot or a pair of orthogonal slots therein for traversing the electron beam to determine width of the electron beam.
An instrument for analysis of a specimen surface by generation of x-rays, comprising electron means for producing an electron beam, an anode assembly with a metal anode film disposed to receive the electron beam so as to generate x-rays from the anode film, and utilization means receptive of the x-rays for utilizing the x-rays, wherein the anode assembly comprises a support block having a channel therein receptive of a fluid coolant, a diamond member mounted in the block so as to have an outer surface diamond member facing outwardly, and a metal anode film bonded to the outer surface, the diamond member communicating thermally with the coolant, and the anode film being receptive of an impinging electron beam to generate x-rays characteristic of the metal, whereby the diamond member provides cooling in compensation for the anode member being heated by the electron beam;
- wherein the electron means comprises an electron gun for producing a focused electron beam so as to generate the x-rays from an anode spot on the anode film, and the utilization means comprises focusing means receptive of at least a portion of the x-rays for focusing said portion of x-rays on an analysis area on the specimen surface such that photoelectrons are emitted from the analysis area with electron energies characteristic of chemical species at the analysis area, analyzer means receptive of at least a portion of the photoelectrons for analyzing the electron energies, and processing means cooperative with the analyzer means for generating specimen information representative of the electron energies and thereby chemical species of the specimen surface.
The instrument 8 wherein the mounting wall is formed of a refractory metal.
Dependencies are inferred from the claim text.