US 5,602,643 A · Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface

Abstract

An improvement to phase-shifting interferometry that consists of the addition of a pupil mask with two parallel slits and a polarizer in the optical path of a conventional phase-shifting interferometer. The pupil-mask/polarizer combination is adapted to produce a linearly polarized wavefront of light reaching the sample surface at a predetermined angle of incidence, thereby producing a corresponding phase shift on reflection. The relative orientation of the mask and polarizer can be changed to take measurements with the polarizer parallel or perpendicular to the mask slits, in each case producing a phase shift on reflection related to the test sample's refractive index and extinction coefficient. Four phase-shifting measurements conducted at .pi./2 intervals for each polarization axis yield sufficient interferometric information to map n, k and the height profile of the sample surface. The preferred mask consists of an opaque disk structure having two opposite annular slits approximately 90-degrees wide and with an outer annular radius approximately twice the size of the inner annular radius.

Claims24

Dependent claims

A phase-shifting interferometer that comprises:

(a) light-source means for producing a light wavefront split between a sample surface and a reference surface;
(b) lens means disposed in an optical path to said sample surface for focusing said light wavefront on the sample surface;
(c) a light-intensity sensor adapted to detect a combination of wavefronts reflected form said reference surface and said sample surface;
(d) opaque mask means disposed within said optical path to the sample surface, said mask means comprising at least two spaced-apart slits adapted to cause said wavefront produced by the light-source means to arrive at the sample surface at a predetermined angle of incidence;
(e) linear polarizer means positioned within said optical path to the sample surface;
and
(f) scanning means for effecting a relative translation between the sample surface and the reference surface to achieve multiple optical path differences at which light-intensity outputs are produced and used to calculate a surface-height output corresponding to the sample surface.

4 more elements

A method for measuring the profile of a sample surface by phase-shifting interferometry accounting for the refractive index and extinction coefficient of the sample material, comprising the following steps:

(a) providing an interferometer that comprises light-source means capable of producing a light wavefront split between a sample surface and a reference mirror;
a focusing lens disposed in an optical path to said sample surface;
a light-intensity sensor adapted to detect a combination of wavefronts reflected form said reference mirror and said sample surface;
an opaque mask disposed within said optical path to the sample surface, said mask comprising at least two spaced-apart slits adapted to cause the wavefront produced by the light-source means to arrive at the sample surface at a predetermined angle of incidence;
a linear polarizer positioned within said optical path to the sample surface;
and scanning means for effecting a relative translation between the sample surface and the reference mirror to achieve multiple optical path differences therebetween at which light-intensity outputs are produced and used to calculate a surface-height output corresponding to the sample surface;
wherein a relative position between the mask and polarizer is adjustable to produce a linearly polarized wavefront oriented substantially in parallel with or perpendicular to a plane of incidence of the polarized wavefront on the sample surface;
(b) adjusting said relative position between the mask and polarizer to produce a linearly polarized wavefront oriented either substantially in parallel with or substantially perpendicular to a plane of incidence of the polarized wavefront on the sample surface;
(c) performing phase-shifting interferometry at multiple scanning positions;
(d) adjusting the relative position between the mask and polarizer by substantially 90 degrees;
(e) performing phase-shifting interferometry at multiple scanning positions;
(f) utilizing the phase measurements derived from steps (c) and (e) to calculate a refractive index and an extinction coefficient of the sample material and a height profile of the sample surface.

9 more elements

Dependencies are inferred from the claim text.

Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface

Life of this patent

Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface

Life of this patent

Abstract

Claims24