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US 5,600,383 AGranted
Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer
AssigneeTexas Instruments Incorporated
InventorLarry J. Hornbeck
Life of this patent
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Abstract
A bistable deformable mirror device (DMD) pixel architecture is disclosed, wherein the torsion hinges are placed in a layer different from the torsion beam layer. This results in pixels which can be scaled to smaller dimensions while at the same time maintaining a large fractional active area, an important consideration for bright, high-density displays such as are used in high-definition television applications.
Claims19
A spatial light modulation device said device comprising:
- a base layer;
- a beam layer;
- a beam support post;
- a hinge supported by said base layer and connected to said rotatable layer by said beam support post wherein said hinge allows said rotatable area to move within a defined motion with respect to said base layer, said hinge lying in a plane separate from the plane of said rotatable layer;
- a hinge gap between said base layer and said hinge allowing for movement of said hinge;
- and
- a beam gap between said hinge and said beam layer allowing for movement of said beam layer.
4 more elements
An array of pixels, each pixel individually rotatable into at least two states, said array comprising:
- a base structure for supporting all of said pixels of said array, said array being maintained in a plane separate from the plane of said base;
- each said pixel defining a surface area, each said pixel being connected to an end of a beam support post and an intermediate portion which is supported by said base structure and connected to each said pixel through an opposite end of said beam support post, said intermediate portion is separated from said base structure by a hinge gap and from each said pixel by a beam gap and positioned therebetween for connecting said base structure to each said pixel by allowing each said pixel to deform with respect to said base.
Dependencies are inferred from the claim text.