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US 5,598,056 AGranted
Multilayer pillar structure for improved field emission devices
AssigneeLucent Technologies Inc.
InventorsSungho Jin, Gregory P. Kochanski, Wei Zhu
Life of this patent
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Abstract
In accordance with the invention, a field emission device is provided with an improved pillar structure comprising multi-layer pillars. The pillars have a geometric structure that traps most secondary electrons and an exposed surface that reduces the number of secondary electrons. Processing and assembly methods permit low-cost manufacturing of high breakdown-voltage devices, including flat panel displays.
Claims3
In a field emission device comprising an emitter cathode, an anode and a plurality of insulating pillars separating said cathode and anode, the improvement wherein:
- at least one of said plurality of insulating pillars comprises a multilayer structure composed of alternating conducting layers and insulating layers;
- wherein said insulating layers are recessed with respect to said conducting layers to form grooves in said at least one of said plurality of insulating pillars.
Dependencies are inferred from the claim text.