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US 5,597,736 AGranted
High-yield spatial light modulator with light blocking layer
AssigneeTexas Instruments Incorporated
InventorJeffrey B. Sampsell
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Abstract
A semiconductor device with an optically active region which receives light, and has a layer of metal which blocks the light from the substrate. The substrate contains addressing circuitry which can experience current leakage if photocarriers are allowed to form by contact with light. A layer of metal is deposited as an integral part of the device to prevent the light from reaching the substrate.
Claims7
A method of manufacturing a semiconductor device comprising:
- a. preparing a substrate;
- b. forming electrically active regions in said substrate;
- c. depositing a blocking layer over said substrate;
- d. depositing an electrode layer over said blocking layer;
- and
- e. patterning said electrode layer to form landing and address electrodes separated by a gap, wherein said gap and said blocking layer are aligned such that light incident said semiconductor device which passes through said gap is blocked by said blocking layer.
3 more elements
Dependencies are inferred from the claim text.