Method of manufacturing using corrosion-resistant apparatus comprising rhodium
AssigneeApplied Materials, Inc.
InventorsManus K. Wong, Sandy M. Chew
Life of this patent
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Abstract
A metal structure, such as an apparatus used in plasma processing of substrates, is rendered resistant to corrosion by coating components exposed to the plasma with a coating of rhodium. The rhodium coating can be made by electroplating, and preferably has a thickness of at least about 10 microinches, and preferably from about 10 to about 100 microinches. A coating of nickel can be applied between the rhodium coating and the metal component.
Claims19
A method of using a corrosion-resistant apparatus to process a substrate in a plasma, the method comprising the steps of:
- (a) selecting an apparatus comprising a processing chamber, having processing components therein, wherein at least one of the processing components is made of metal, is exposed to the plasma, and has a corrosion-resistant coating comprising rhodium;
- (b) introducing a process gas into the processing chamber;
- and
- (c) generating the plasma from the process gas for processing the substrate.
A method of processing a substrate in a corrosion-resistant apparatus using corrosive process gas, the method comprising the steps of:
- (a) selecting an apparatus comprising a process chamber having processing components therein, wherein at least one of the processing components is exposed to the corrosive process gas and has a corrosion-resistant coating comprising rhodium;
- (b) introducing corrosive process gas into the process chamber;
- and
- (c) setting process conditions in the process chamber that are suitable for processing the substrate from the corrosive process gas.
Dependencies are inferred from the claim text.