Cleaning method and cleaning apparatus

A method of cleaning a metal, electronic, semiconductor, ceramic, glass, plastic, optical or surface-treated part comprising the steps of:

• a) cleaning the part by use of a cleaning agent consisting essentially of a solvent selected from at least one of the group consisting of perfluorocarbons, hydrocarbons selected from the group consisting of terpenes, kerosene, hydrocarbons having from 4 to 30 carbon atoms, paraffins, and alkylbenzenes, and silicones selected from the group consisting of straight chain polyorganosiloxanes represented by the formula:
• ##STR4## and a cyclic polyorganosiloxane represented by the formula:
• ##STR5## wherein R in each formula is independently a substituted or unsubstituted monovalent hydrocarbon group, 1 is an integer from 0 to 5, and m is an integer from 3 to 7, and
• b) drying said part by the use of a vapor drying agent comprising perfluorocarbons,
• wherein during the drying step the part is at a temperature lower than the boiling point of the vapor drying agent, such that during said drying said vapor drying agent condenses on the part and at a temperature below the boiling point of the perfluorocarbon, forms a miscible blend with cleaning agent which remains on the part after step (a), and wherein said blend washes off the surface of the part, thereby drying and cleaning said part.