Method for manufacturing thin film of composite metal-oxide dielectric

A method for manufacturing a thin film of composite metal-oxide dielectric, consisting essentially of the steps of:

• a) preparing a precursor solution in a sol state containing component elements of materials of the composite metal-oxide dielectric;
• b) forming a thin film in a sol state on a substrate with said precursor solution;
• c) drying the thin film in the sol state at 100.degree. C. for ten minutes by removing residual moisture therefrom to form a thin film of dry gel;
• d) decomposing thermally and removing organic substances within the thin film from step (c) and simultaneously crystallizing an obtained dry gel thin film from step (c) by subjecting the obtained dry gel thin film from step (c) to a heat treatment at 500.degree. to 600.degree. C.;
• and
• e) repeating steps (b) to(d) several times to obtain a thin film of composite metal-oxide dielectric having a desired thickness.