# US 5,591,980 A · Bi-axial-tilting specimen fine motion device and method of correcting image shifting

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- Number: US 5,591,980 A
- Document ID: US5591980A
- Status: Granted
- Kind: A
- Application number: 08/492,878
- Filed: 1995-06-20
- Granted: 1997-01-07
- Earliest claimed: 1994-06-29
- Assignees: Hitachi, Ltd.; Hitachi Science Systems, Ltd.
- Inventors: Mitsuo Ogasawara; Hiroyuki Kobayashi; Morioki Kubozoe
- Web page: https://patentgrep.com/patent/US5591980A

## CPC

- H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
- H01J 2237/20242: Eucentric movement
- H01J 2237/20285: computer-controlled
- H01J 2237/26: Electron or ion microscopes
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

In a eucentric side entry goniometer stage used in an electron microscope controlled in five-axes of specimen positions (x, y, z) and specimen tilt angles (.theta..sub.x, .theta..sub.y), image shifting during tilting a specimen is automatically corrected. Assuming that the coordinates of an observed point are (x, y, z), shifting of observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when the tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 wherein .DELTA.y=y(1-cos .theta..sub.y2 /cos .theta..sub.y1) .DELTA.z=y(sin .theta..sub.y2 -sin .theta..sub.y1)/cos .theta..sub.y1.

## Claims

### Claim 1

A eucentric side entry bi-axial-tilting specimen fine motion device comprising:
a specimen holder movable forward and backward in a direction nearly perpendicular to an optical axis and universally pivotable and rotatable around a point of support positioned on the center axis of the specimen holder,
a specimen table rotatable provided on said specimen holder,
a specimen position and tilt angle controller, and
a calculator;
where, in a coordinate system in which an axis intersecting the center axis of said specimen holder at a right angle on said specimen holder is the x-axis, an axis connecting an observed point positioned on said optical axis and said point of support and intersecting said optical axis at a right angle is the y-axis, an axis perpendicular to said x-axis and said y-axis is the z-axis, a tilt angle of said x-axis to the plane perpendicular to said optical axis is .theta..sub.x, a tilt angle to the center axis of said specimen holder in said specimen table being rotatable around said x-axis is .theta.y, a coordinate of said observed point having the intersecting point of the center axis of said specimen holder and said x-axis as the point of origin is (x, y, z);
a shifting of an observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using said calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using said specimen position and tilt angle controller when said tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2
.DELTA.y=y(1-cos .theta..sub.y2 /cos .theta..sub.y1)
.DELTA.z=y(sin .theta..sub.y2 -sin .theta..sub.y1)/cos .theta..sub.y1)/cos .theta..sub.y1.

### Claim 2

A eucentric side entry bi-axial-tilting specimen fine motion device comprising:
a specimen holder movable forward and backward in a direction nearly perpendicular to an optical axis and universally pivotable and rotatable around a point of support positioned on the center axis of the specimen holder,
a specimen table rotatable provided on said specimen holder,
a specimen position and tilt angle controller, and
a calculator;
where, in a coordinate system in which an axis intersecting the center axis of said specimen holder at right angle on said specimen holder is the x-axis, an axis connecting an observed point positioned on said optical axis and said point of support and intersecting said optical axis at right angle is the y-axis, an axis perpendicular to said x-axis and said y-axis is the z-axis, a tilt angle of said x-axis to the plane perpendicular to said optical axis is .theta..sub.x, a tilt angle to the center axis of said specimen holder in said specimen table being rotatable around said x-axis is .theta..sub.y, a coordinate of said observed point having the intersecting point of the center axis of said specimen holder and said x-axis as the point of origin is (x, y, z):
a shifting of an observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using said calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using said specimen position and tilt angle controller when said tilt angle .theta.y is varied by a very small value of change .DELTA..theta.y;
.DELTA.y=y(1-cos .theta..sub.y1 +.DELTA..theta..sub.y)/cos .theta..sub.y1)
.DELTA.z=y(sin (.theta..sub.y1 +.DELTA..theta..sub.y)-sin .theta..sub.y1)/cos .theta..sub.y1
wherein .theta..sub.y1 is the value of .theta..sub.y just before changing the tilt angle .theta..sub.y by the very small value of change .DELTA..theta..sub.y.

### Claim 3

A eucentric side entry bi-axial-tilting specimen fine motion device comprising:
a specimen holder movable forward and backward in the direction nearly perpendicular to an optical axis and universally pivotable and rotatable around a point of support positioned on the center axis of the specimen holder,
a specimen table rotatable provided on said specimen holder,
a specimen position and tilt angle controller, and
a calculator;
where, in a coordinate system in which an axis intersecting the center axis of said specimen holder at right angle on said specimen holder is the x-axis, an axis connecting an observed point positioned on said optical axis and said point of support and intersecting said optical axis at right angle is the y-axis, an axis perpendicular to said x-axis and said y-axis is the z-axis, a tilt angle of said x-axis to the plane perpendicular to said optical axis is .theta..sub.x, a tilt angle to the center axis of said specimen holder in said specimen table being rotatable around said x-axis is .theta..sub.y, a coordinate of said observed point having the intersecting point of the center axis of said specimen holder and said x-axis as the point of origin is (x, y, z):
a shifting of observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using said calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using said specimen position and tilt angle controller when said tilt angle .theta.y is varied by a very small value of change .DELTA..theta.y;
.DELTA.y=y(1-cos .DELTA..theta..sub.y +tan .theta..sub.y1 .multidot.sin .DELTA..theta..sub.y)
.DELTA.z=y{tan .theta..sub.y1 (cos .DELTA..theta..sub.y -1)+sin .DELTA..theta.y}
wherein .theta..sub.y1 is the value of .theta..sub.y just before changing the tilt angle .theta..sub.y by the very small value of change .DELTA..theta..sub.y.

### Claim 4

A eucentric side entry bi-axial-tilting specimen fine motion device comprising:
a specimen holder movable forward and backward in the direction nearly perpendicular to an optical axis and universally pivotable and rotatable around a point of support positioned on the center axis of the specimen holder,
a specimen table rotatable provided on said specimen holder,
a specimen position and tilt angle controller, and
a calculator;
where, in a coordinate system in which an axis intersecting the center axis of said specimen holder at right angle on said specimen holder is the x-axis, an axis connecting an observed point positioned on said optical axis and said point of support and intersecting said optical axis at right angle is the y-axis, an axis perpendicular to said x-axis and said y-axis is the z-axis, a tilt angle of said x-axis to the plane perpendicular to said optical axis is .theta..sub.x, a tilt angle to the center axis of said specimen holder in said specimen table being rotatable around said x-axis is .theta..sub.y, a coordinate of said observed point having the intersecting point of the center axis of said specimen holder and said x-axis as the point of origin is (x, y, z):
a shifting of an observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using said calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using said specimen position and tilt angle controller when said tilt angle .theta.y is varied by a very small value of change .DELTA..theta.y;
.DELTA.y=y{(.DELTA..theta..sub.y /2).sup.2 +tan .theta..sub.y1 .multidot..DELTA..theta..sub.y }
.DELTA.z=y{tan .theta..sub.y1 .multidot.(.DELTA..theta./2).sup.2 +.DELTA..theta..sub.y }
wherein .theta..sub.y1 is the value of .theta..sub.y just before changing the tilt angle .theta..sub.y by the very small value of change .DELTA..theta..sub.y.

### Claim 5 (depends on 1, 4)

A eucentric side entry bi-axial-tilting specimen fine motion device according to any one of claim 1 to claim 4, which further comprises a display to show the coordinates and the tile angles in the observed point of the specimen, said display having display portions for the x-coordinate and the y-coordinate of said observed point when both of the tile angles .theta..sub.x and .theta..sub.y are zero degree.

### Claim 6

A method of correcting image shifting in a eucentric side entry bi-axial-tilting specimen fine motion device capable of controlling the coordinates (x, y, z) of an observed point to an x-axis intersecting the center axis of a specimen holder universally pivotable around a point of support on the point of origin at right angle, a y-axis connecting said observed point positioned on an optical axis and said point of support and intersecting said optical axis at right angle, a z-axis intersecting said x-axis and said y-axis at right angles; and a tilt angle .theta..sub.x of said x-axis to the plane perpendicular to said optical axis; a tilt angle .theta..sub.y to the center axis of said specimen holder containing a specimen table being rotatable around said x-axis; wherein coordinates of said observed point to said point of origin are (x, y, z) said method comprising the steps of:
calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations, and
automatically shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when said tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 :
.DELTA.y=y(1-cos .theta..sub.y2 /cos .theta..sub.y1)
.DELTA.z=y(sin .theta..sub.y2 -sin .theta..sub.y1)/cos .theta..sub.y1.

### Claim 7

A method of correcting image shifting in a eucentric side entry bi-axial-tilting specimen fine motion device capable of controlling the coordinates (x, y, z) of an observed point to an x-axis intersecting the center axis of a specimen holder universally pivotable around a point of support on the point of origin at right angle, a y-axis connecting said observed point positioned on an optical axis and said point of support and intersecting said optical axis at right angle, a z-axis intersecting said x-axis and said y-axis at right angles; and a tilt angle .theta..sub.x of said x-axis to the plane perpendicular to said optical axis; a tilt angle .theta..sub.y to the center axis of said specimen holder containing a specimen table being rotatable around said x-axis; wherein coordinates of said observed point to said point of origin are (x, y, z), said method comprising the steps of:
calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations, and
automatically shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when said tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 ;
.DELTA.y=y(1-cos (.theta..sub.y1 +.DELTA..theta..sub.y)/cos .theta..sub.y1)
.DELTA.z=y(sin (.theta..sub.y1 +.DELTA..theta..sub.y)-sin .theta..sub.y1)/cos .theta..sub.y1
wherein .theta..sub.y1 is the value of .theta..sub.y just before changing the tilt angle .theta..sub.y by a very small value of change .DELTA..theta..sub.y.

### Claim 8

A method of correcting image shifting in a eucentric side entry bi-axial-tilting specimen fine motion device capable of controlling the coordinates (x, y, z) of an observed point to an x-axis intersecting the center axis of a specimen holder universally pivotable around a point of support on the point of origin at right angle, a y-axis connecting said observed point positioned on said optical axis and said point of support and intersecting an optical axis at right angle, a z-axis intersecting said x-axis and said y-axis at right angles; and a tilt angle .theta..sub.x of said x-axis to the plane perpendicular to said optical axis; a tilt angle .theta..sub.y to the center axis of said specimen holder containing a specimen table being rotatable around said x-axis; wherein coordinates of said observed point to said point of origin are (x, y, z), said method comprising the steps of:
calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations, and
automatically shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when said tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 ;
.DELTA.y=y(1-cos .DELTA..theta..sub.y +tan .theta..sub.y1 .multidot.sin .DELTA..theta..sub.y)
.DELTA.z=y{tan .theta..sub.y1 (cos .DELTA..theta..sub.y -1)+sin .theta..sub.y }
wherein .theta..sub.y1 is the value of .theta..sub.y just before changing the tilt angle .theta..sub.y by a very small value of change .DELTA..theta..sub.y.

### Claim 9

A method of correcting image shifting in a eucentric side entry bi-axial-tilting specimen fine motion device capable of controlling the coordinates (x, y, z) of an observed point to an-axis intersecting the center axis of a specimen holder universally pivotable around a point of support on the point of origin at right angle, a y-axis connecting said observed point positioned on an optical axis and said point of support and intersecting said optical axis at right angle, a z-axis intersecting said x-axis and said y-axis at right angles; and a tilt angle .theta..sub.x of said x-axis to the plane perpendicular to said optical axis; a tilt angle .theta..sub.y to the center axis of said specimen holder containing a specimen table being rotatable around said x-axis; wherein coordinates of said observed point to said point of origin are (x, y, z), said method comprising the steps of:
calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations, and
automatically shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt controller when said tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 ;
.DELTA.y=y{(.DELTA..theta..sub.y /2).sup.2 +tan .theta..sub.y1 .multidot..DELTA..theta..sub.y }
.DELTA.z=y{tan .theta..sub.y1 .multidot.(.DELTA..theta..sub.y /2).sup.2 +.DELTA..theta..sub.y }
wherein .theta..sub.y1 is the value of .theta..sub.y just before changing the tilt angle .theta..sub.y by a very small value of change .DELTA..theta..sub.y.

### Claim 10

In a method of adjusting a specimen position using a eucentric side entry bi-axial-tilting specimen fine motion device capable of controlling the coordinates (x, y, z) of an observed point to an x-axis intersecting the center axis of a specimen holder universally pivotable around a point of support on the point of origin at right angle, a y-axis connecting said observed point positioned on an optical axis and said point of support and intersecting said optical axis at right angle, a z-axis intersecting said x-axis and said y-axis at right angles; and a tilt angle .theta..sub.x of said x-axis to the plane perpendicular to said optical axis; a tilt angle .theta..sub.y to the center axis of said specimen holder containing a specimen table being rotatable around said x-axis; wherein coordinates of said observed point to said point of origin are (x, y, z), said method comprising the steps of:
changing an x-coordinate position of the observed point of a specimen to a desired position and storing and displaying the value of the x-coordinate;
changing a y-coordinate position of the observed point of the specimen to a desired position and storing and displaying the value of the y-coordinate;
adjusting a z-coordinate position of the observed point of the specimen to focus on the observed point; changing the tilt angle .theta..sub.x and storing and displaying the value of the z-coordinate; changing the tilt angle .theta..sub.y by a very small value of change .DELTA..theta..sub.y ; and shifting an observed image automatically corrected by
calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations, and
automatically shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when said tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 :
.DELTA.y=y(1-cos 74 .sub.y2 /cos .theta..sub.y1)
.DELTA.z=y(sin .theta..sub.y2 -sin .theta..sub.y1)/cos .theta..sub.y1.