Apparatus for precise alignment and placement of optoelectric components
AssigneeLucent Technologies Inc.
InventorsRichard S. Armington, Leroy D. L'Esperance
Life of this patent
Estimating the term…
Abstract
An apparatus and method is provided that superimposes an image of an optoelectric component on a substrate with the use of a single camera. Specifically, the camera looks through a transparent alignment tool that is holding the component, to the substrate below it, thus allowing both the component and the substrate to be seen together by the camera. The alignment tool and substrate are adjusted to precisely align the two and then are brought together while being seen by the camera. On laser chips, the chip is energized while on the glass alignment tool to produce a laser spot that is superimposed on the visible light image via a series of lenses and mirrors.
Claims17
An apparatus for alignment and placement of a component on a substrate having a substrate support means for supporting said substrate thereon, said substrate configured to receive said component, comprising:
- tool means for aligning and placing said component on said substrate, including a substantially light transparent portion and an electrically conductive portion configured to selectively energize said component to emit light;
- and
- an image gathering optics system including at least one camera positioned relative to said tool means and said substrate for receiving positional information regarding said component and said substrate through said light transparent portion while said component is secured to said tool means by a holding means.
The apparatus of claim 4 wherein said electrically conductive portion comprises an Indium Tin Oxide strip.
An apparatus for alignment and placement of an optoelectric component on a substrate having a substrate support means for supporting said substrate thereon, said substrate configured to receive said optoelectric component, comprising:
- tool means for aligning and placing said optoelectric component on said substrate, including a substantially light transmissive portion, a plurality of electrically conductive portions as a plurality of electrical contacts to selectively energize said optoelectric component, creating a laser spot on said optoelectric component, and a means to energize said optoelectric component;
- holding means for temporarily securing optoelectric component to tool means, including a plurality of transparent optical flat plates horizontally layered, the lowest of said transparent optical flat plates having a small bore vertically down to a capillary tube forming a vacuum on said capillary tube to said bore and through a spacing between said layers of said flat plates, allowing said optoelectric component to be held to tool means;
- and
- an image gathering system including a plurality of cameras for correlation and calibration including at least one white light camera positioned relative to said tool means and said substrate support means for receiving positional information regarding said optoelectric component and said substrate through said light transmissive portion of said optoelectric component and at least one infrared camera positioned relative to said tool means and said substrate support means for receiving positional information regarding said laser spot on said optoelectric component, a probe contacting said optoelectric component aiding in energizing said optoelectric component, and a calibration means to correlate and mathematically evaluate a plurality of images from said at least one white light camera and said at least one infrared camera.
Dependencies are inferred from the claim text.