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US 5,585,722 AGranted
Apparatus for measuring physical properties of micro area
AssigneeHitachi, Ltd.
InventorsShigeyuki Hosoki, Tsuyoshi Hasegawa, Makiko Kohno
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AssigneeHitachi, Ltd.
InventorsShigeyuki Hosoki, Tsuyoshi Hasegawa, Makiko Kohno
Estimating the term…
An apparatus for measuring physical properties of micro area which has an object to measure physical properties from a micro area on an atomic scale on the surface of a test sample such as electron spin, nuclear magnetic moment, and nuclear quadrupole moment in high sensitivity, allows the probe 2 of the atomic force microscope to approach the surface of the test sample 1, applies a magnetic field to the test sample 1 by the magnetic field generation coil 27 and the magnetic paths 22 to 26 and furthermore a high frequency electromagnetic field to the test sample 1 by the coils 16 and 17 respectively, and detects a signal from atoms existing on the surface of the test sample 1 which are resonant with the high frequency electromagnetic field by the probe 2.
An apparatus for measuring physical properties of a micro area of a sample, said apparatus comprising a probe, a servo circuit for flowing a tunneling current between said probe and the sample and controlling a location of the probe, means for applying a static magnetic field and high frequency electric field to the sample so as to generate a resonance signal, and selecting means for selecting alternately one of the tunneling current and resonance signal as a detection object in a gap between the sample and the probe.
Dependencies are inferred from the claim text.