Apparatus for two or three dimensional optical inspection of a sample
AssigneeNew Creation Co., Ltd.
InventorKazumi Haga
Life of this patent
Estimating the term…
Abstract
In an optical inspecting apparatus, first, a sample is illuminated with light. Then, an optical element causes light reflected from the sample or light transmitted through the sample to be focused, to thereby permit same to pass through an aperture stop arranged on a back focal plane or in its vicinity of the optical element. A telecenttic system converts the light having passed through the aperture stop into a parallel light. An image on the air formed by the telecentric system is viewed for inspection of the sample surface.
Claims17
Apparatus for two or three dimensional inspection of a sample, said apparatus comprising:
- illuminating means for illuminating a sample with an illuminating light;
- an optical element for focusing light from said sample;
- stop means for blocking light from irregular areas of said sample, said stop means comprising an aperture stop arranged in proximity to a back focal plane of said optical element;
- a first telecentric system arranged on a back side of said aperture stop for converting light having passed through said aperture stop into a collimated light beam;
- a plurality of viewing blocks optically coupled to receive said collimated light beam from said first telecentric system;
- each of said viewing blocks being configured to form an image of a portion of said sample, respective portions viewed by each of said viewing blocks being different from portions viewed by others of said viewing blocks;
- and
- image processing means for synthesizing images formed by a plurality of said viewing blocks to form a single combined image of an area of said sample, said combined image having an image scale which is enlarged relative to a viewing block forming an image of all of said sample.
Apparatus for two or three dimensional inspection of a sample, said apparatus comprising:
- illuminating means for illuminating a sample with an illuminating light;
- an optical element for focusing light from said sample;
- stop means for blocking light from irregular areas of said sample, said stop means comprising an aperture stop arranged in proximity to a back focal plane of said optical element;
- a first telecentric system arranged on a back side of said aperture stop for converting light having passed through said aperture stop into a collimated light beam;
- at least one viewing block optically coupled to receive said collimated light beam from said first telecentric system;
- a rotatable optical element arranged in an optical path of said collimated light beam and coupling said collimated light beam to said at least one viewing block;
- an aperture element arranged in said optical path of said collimated light beam and limiting a portion of said sample which is viewed by at least a first one of said at least one viewing block;
- and
- means for causing said rotatable optical element to rotate an image of said sample contained in said collimated light beam relative to said aperture element whereby said viewing block sequentially receives images of different portions of said sample.
Dependencies are inferred from the claim text.