Process for making josephson junctions
AssigneeShimadzu Corporation
InventorsShinji Nagamachi, Masahiro Ueda, Kei Shinada, Mitsuyoshi Yoshii
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Abstract
A process for fabricating the Josephson junction includes the steps of preparing a substrate, forming a first superconducting layer, forming a second superconducting layer transversely on the first layer with an insulating layer interposed therebetween wherein the insulating layer is an oxide or nitride of the superconducting material, and injecting ion beams into the insulating layer so as to form low oxygen- or nitrogen-concentrated area linking the first and second layers.
Claims8
A process for fabricating a Josephson junction comprising the steps of:
- preparing a substrate;
- forming a first layer of superconducting material on said substrate;
- forming a second layer of superconducting material transversely on the first layer with an insulating layer interposed therebetween wherein the insulating layer is an oxide of the superconducting material;
- and
- injecting ion beams into the insulating layer, thereby forming an area between the first and second layers which has a lower oxygen concentration than the insulating layer.
A process for fabricating a Josephson junction comprising the steps of:
- preparing a substrate;
- forming a first layer of superconducting material on said substrate;
- forming a second layer of superconducting material transversely on the first layer with an insulating layer interposed therebetween wherein the insulating layer is a nitride of the superconducting material;
- and
- injecting ions into the insulating layer thereby forming an area between the first and second layers which has a lower nitrogen concentration than the insulating layer.
A process for fabricating a Josephson junction comprising the steps of:
- preparing a substrate;
- forming a first layer of superconducting material on said substrate;
- forming a second layer of superconducting material transversely on the first layer with an insulating layer interposed therebetween wherein the insulating layer is an oxide of a substance having proximity effect for the superconducting material of the first and second layers;
- and
- injecting ion beams into the insulating layer, thereby forming an area between the first and second layers which has a lower oxygen concentration than the insulating layer.
A process for fabricating a Josephson junction comprising the steps of:
- preparing a substrate;
- forming a first layer of superconducting material on said substrate;
- forming a second layer of superconducting material transversely on the first layer with an insulating layer interposed therebetween wherein the insulating layer is a nitride of a substance having proximity effect for the superconducting material of the first and second layers;
- and
- injecting ion beams into the insulating layer thereby forming an area between the first and second layers which has a lower nitrogen concentration than the insulating layer.
Dependencies are inferred from the claim text.