Micro electromechanical RF switch

A micro electromechanical RF switch formed on a substrate, comprising:

• an anchor structure, a bottom electrode, and a signal line formed on the substrate;
• said signal line having a gap forming an open circuit;
• a cantilever arm attached to said anchor structure and extending over said bottom electrode and said signal line gap;
• a metal contact formed on said cantilever and remote from said anchor structure and positioned facing said gap in said signal line;
• a top electrode formed on said cantilever arm and extending to a position opposite said bottom electrode;
• a portion of said cantilever arm and said top electrode positioned opposite said bottom electrode forming a capacitor structure;
• said capacitor structure having a grid of holes extending through said cantilever arm and top electrode;
• and
• a voltage selectively applied to said top electrode generating an electrostatic force attracting said capacitor structure toward said bottom electrode thereby causing said metal contact on said cantilever arm to close said gap in said signal line.

A micro electromechanical RF switch formed on a substrate, comprising:

• an anchor structure, a metal bottom electrode, and a metal signal line formed on the substrate;
• said signal line having a gap forming an open circuit;
• a cantilever arm formed of insulating material attached to said anchor structure and extending over said bottom electrode and said signal line gap;
• a metal contact formed on said cantilever arm remote from said anchor structure and positioned facing said gap in said signal line;
• a metal top electrode formed atop said cantilever arm and extending to a position opposite said bottom electrode;
• a capacitor structure comprising a portion of said cantilever arm and said top electrode positioned opposite said bottom electrode, said capacitor structure having a grid of holes extending through said cantilever arm and top electrode;
• and
• the switch actuatable by a voltage selectively applied to said top electrode for generating an electrostatic force to attract said capacitor structure toward said bottom electrode and thereby close said gap in said signal line with said metal contact on said cantilever arm.