Method of metallizing high aspect ratio apertures
AssigneeMotorola, Inc.
InventorsJohn K. Arledge, Thomas J. Swirbel, Joaquin Barreto
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Abstract
A method of manufacturing high aspect ratio plated through holes in a circuit carrying substrate. High aspect ratio apertures or holes (16) are formed in a substrate (10). A thin film of copper (20) is sputtered onto the substrate and in the apertures that a macroscopically discontinuous copper film (26) is formed on part of the aperture walls. The macroscopically discontinuous copper film is substantially thinner than the copper film that is deposited on the surface. A catalytic copper coating (30) is plated directly on the vacuum deposited thin film of copper by electroless copper plating in a manner sufficient to form a macroscopically continuous copper layer on the aperture walls.
Claims13
A method of manufacturing a circuit carrying substrate, comprising the following steps in the order named:
- a) providing a substrate having an aperture therein, the aperture having walls and a high aspect ratio;
- b) vacuum depositing a thin film of copper on a major surface of the substrate and in the aperture, in a manner sufficient to form a macroscopically discontinuous copper film on the aperture walls, said macroscopically discontinuous copper film being substantially thinner than the thin film of copper deposited on the major surface;
- and
- c) depositing a catalytic copper coating directly on the vacuum deposited thin film of copper by immersing the substrate in an electroless copper plating bath in a manner sufficient to form a macroscopically continuous copper layer on the aperture walls.
A method of metallizing high aspect ratio apertures in a printed circuit board, comprising the following steps in the order named:
- a) providing a printed circuit laminate having apertures therein, the apertures having sidewalls and an aspect ratio greater than 4/1;
- b) sputtering a thin film of copper on a major surface of the printed circuit laminate and in the apertures, such that the thin film of copper deposited on the major surface is between 4,000 and 20,000 Angstroms thick and such that the thin film of copper deposited on the aperture sidewalls is less than 100 Angstroms thick and macroscopically discontinuous;
- and
- c) depositing a layer of electroless copper on the thin film of copper by immersing the printed circuit laminate in an auto-catalytic copper plating bath until a macroscopically continuous layer of copper is formed on the aperture sidewalls.
Dependencies are inferred from the claim text.