Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
AssigneeApplied Materials, Inc.
InventorsKenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, II, Robert P. Hartlage, Viktor Shel
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Abstract
The disclosure discusses impedance matching circuits based on parallel-resonant L-C tank circuits, and describes a low-loss design for an adjustable inductance element suitable for use in these parallel tank circuits. The application of an impedance matching circuit to a plasma process is also disclosed; in this context, a local impedance transformation circuit is used to improve power transfer to the plasma source antenna.
Claims20
An impedance matching network having a first and a second terminal for connecting a variable load therebetween and an electrical signal generator which produces a driving signal on said first terminal, wherein during operation said impedance matching network is connected to a control circuit that generates first and second control signals that are responsive to changes in said variable electrical load, said impedance matching network comprising
- a first tank circuit comprising a variable inductance element responsive to said first control signal and a fixed capacitance element, said first tank circuit connected between said first terminal and a grounded node,
- a second tank circuit comprising a variable inductance element responsive to said second control signal and a fixed capacitance element, said second tank circuit connected between said second terminal and said grounded node.
An impedance matching network having an input and an output terminal for connection between an electrical signal generator which produces a driving signal on said input terminal and a variable electrical load which receives said driving signal at said output terminal, wherein during operation said impedance matching network is connected to a control circuit that generates first and second control signals that are responsive to changes in said variable electrical load, said impedance matching network comprising:
- a first tank circuit, including a variable inductance element responsive to said first control signal, and a fixed capacitance element, said first tank circuit connected between said input terminal and a grounded node;
- a second tank circuit including a variable inductance element responsive to said second control signal, and a fixed capacitance element, said second tank circuit connected between said output terminal and said grounded node;
- and
- an impedance element connected between said input terminal and said output terminal.
Dependencies are inferred from the claim text.