Soft magnetic alloy and plane magnetic element
AssigneeAlps Electric Co., Ltd.
InventorsYsuo Hayakawa, Akinori Kojima, Akihiro Makino
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Abstract
A soft magnetic alloy film includes: a fine crystalline phase having an average grain size of 10 nm or less and essentially consisting of Fe of b-c-c structure; and an amorphous phase containing a rare earth element or at least one of the elements, Ti, Zr, Hf, V, Nb, Ta and W, and O (oxygen) in a large amount, the fine crystalline phase and amorphous phase existing in a mixed state, with the proportion of the fine crystalline phase of Fe of b-c-c structure to the entire structure being 50% or less. A plane magnetic element employs such a soft magnetic alloy.
Claims10
A soft magnetic alloy film comprising:
- a crystalline phase having an average grain size of 10 nm or less and consisting essentially of Fe having a b-c-c structure;
- and
- an amorphous phase consisting of:
- Fe,
- at least one element from the group consisting of rare earth elements, Ti, Zr, Hf, V, Nb, Ta and W, and
- O (oxygen);
- wherein said crystalline phase and amorphous phase exist in a mixed state, the crystalline phase and the amorphous phase constituting an entire soft magnetic alloy film structure, and
- wherein the proportion of said crystalline phase to the entire soft magnetic alloy film structure is 10 to 50%.
A plane magnetic element comprising:
- a substrate,
- a spiral plane coil formed on the substrate,
- an insulating layer formed on the spiral plane coil, and
- a soft magnetic alloy film formed on the insulating layer, wherein said soft magnetic alloy film comprises:
- a crystalline phase having an average grain size of 10 nm or less and consisting essentially of Fe having a b-c-c structure;
- and
- an amorphous phase consisting of:
- Fe,
- at least one element from the group consisting of rare earth elements, Ti, Zr, Hf, V, Nb, Ta and W, and
- O (oxygen),
- wherein said crystalline phase and amorphous phase existing in a mixed state, the crystalline phase and the amorphous phase constituting an entire soft magnetic alloy film structure, and
- wherein the proportion of said crystal phase to the entire soft magnetic alloy film structure is 10 to 50%.
Dependencies are inferred from the claim text.