Fluidized bed reactor for preparing metal nitride
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHirofumi Fukuoka, Yoshiharu Konya, Masanori Fukuhira, Ichiro Ishizaka
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHirofumi Fukuoka, Yoshiharu Konya, Masanori Fukuhira, Ichiro Ishizaka
Estimating the term…
In a fluidized bed reactor for preparing a metal nitride by feeding metal powder and a non-oxidizing gas containing N.sub.2 or NH.sub.3 into a reaction tube (1) to form a fluidized bed (2) therein and heating the fluidized bed for nitriding the metal powder, an envelope (11) encloses the reaction tube (1) for preventing the surrounding air from entering the reaction tube. A heater (9) is disposed outside the envelope (11) for heating the fluidized bed (2) to 1,200.degree. C. or higher. The envelope prevents penetration of the surrounding air into the reaction tube and also prevents deterioration of the heater and surrounding components by scattering of metal fines. The reactor ensures safe operation to prepare metal nitride powder of high purity on an industrial scale.
A fluidized bed reactor for preparing a metal nitride by mixing metal powder with a non-oxidizing gas containing N.sub.2 or NH.sub.3 to form a fluidized bed and heating the fluidized bed at a temperature of at least 1,200.degree. C. for nitriding the metal powder, said reactor comprising
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