Apparatus and method for determining the resistance of antifuses in an array

An integrated circuit comprising:

• at least one circuit structure including functional circuitry, interconnect conductors, antifuses formed in vias for selectively connecting inputs and outputs of the functional circuitry to one another through at least one of said interconnect conductors, and at least one programming transistor for selectively applying a programming voltage potential across said antifuses;
• an antifuse resistance measurement structure electrically identical to said at least one circuit structure in which said antifuses are replaced by contact plugs in said visa;
• an input pin on said integrated circuit for applying a programming voltage potential to said integrated circuit;
• addressing circuitry for turning on selected ones of said programming transistors.

An integrated circuit comprising:

• a first circuit node;
• a second circuit node;
• a first interconnect conductor;
• a second interconnect conductor;
• an antifuse connected between said first and second interconnect conductors;
• at least one first programming transistor connected between said first circuit node and said first interconnect conductor;
• at least one second programming transistor connected between said second circuit node and said second interconnect conductor;
• a first reference conductor, said first reference conductor having substantially the same resistance as said first interconnect conductor;
• a second reference conductor, said second reference conductor having substantially the same resistance as said second interconnect conductor;
• a via plug connected between said first and second reference conductors;
• at least one first reference transistor connected between said first circuit node and said first reference conductor, said at least one first reference transistor being substantially identical to said at least one first programming transistor;
• at least one second reference transistor connected between said second circuit node and said second reference conductor, said at least one second reference transistor being substantially identical to said at least one second programming transistor;
• addressing circuitry, connected to selectively turn on said at least one first and second programming transistors and to said at least one first and second reference transistors.