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US 5,569,916 AGranted
Electron spectroscopy apparatus
AssigneeAgency of Industrial Science & Technology, Ministry of International Trade & Industry
InventorToshihisa Tomie
Life of this patent
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Abstract
An electron spectroscopy apparatus in which pulses of EUV of a prescribed wavelength are generated from plasma produced by pulsed laser beam irradiation of a target containing specific elements, the EUV pulses are used to irradiate a specimen, producing an emission of photoelectrons from the specimen, and the time it takes these photoelectrons to pass along a flight channel is measured and analyzed.
Claims14
An electron spectroscopy apparatus, comprising:
- means for generating EUV pulses using a laser plasma composed mainly of a single ion species produced by the irradiation of a pulsed laser beam on a solid target containing a specific element, said single ion species emitting EUV pulses of a plurality of spectrally well-separated lines;
- means for filtering said EUV pulses to obtain EUV pulses of a single spectral line;
- means for irradiating a specimen to be analyzed with said filtered EUV pulses;
- a flight channel for passage of photoelectrons emitted from said specimen irradiated by said EUV pulses;
- and
- electron current measurement means for measuring a distribution of flight time of said photoelectrons.
3 more elements
Dependencies are inferred from the claim text.