Method for fabrication of microchannel electron multipliers
AssigneeCenter for Advanced Fiberoptic Applications
InventorsAlan M. Then, Steven M. Shank, Robert J. Soave, G. William Tasker
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Abstract
The present invention discloses a method for constructing a completely micromachined MCP that is activated with thin-film dynodes wherein the interchannel regions are first dry etched in the substrate, resulting in channel pillars. The etched portions of the substrate are then back filled and the channel pillars are thereafter removed to produce a micromachined perforated microchannel plate. The technique may be employed to produce an active element for an integrated image tube or photomultiplier tube.
Claims26
A method of manufacturing a microchannel plate comprising the steps of:
- forming a body of etchable material;
- applying a flux of reactive particles against the body in selected areas for removing material from the selected areas;
- back filling the selected areas with a membrane material;
- selectively removing material adjacent the back filled areas to produce microchannels in the membrane material;
- and
- activating the microchannels for electron multiplication by forming a continuous thin-film dynode therein.
A method for manufacturing an electron multiplier comprising forming a body of etchable material, directionally applying a flux of reactive particles against the body in selected areas for removing material therefrom in order to form at least one perforation;
- filling the perforation with a membrane material resistant to an etching process for material of the body and removing material of the body by said process around the filled perforation to form at least one channel in the membrane material suitable for receiving a thin-film dynode to support electron multiplication.
Dependencies are inferred from the claim text.